Design of Radiation “Hard” Sensor

• Example: ATLAS Pixel sensor

• right now one of the “hardest” designs

• pixel size 50µm x 400µm
  • 50 µm pitch
  • 12µm diameter bump connection

• total active area 1.75m2 (1700 modules)
  • high yield
  • testability

• 10 years operation
  • fault tolerance

• harsh radiation environment
  • up to 1015 cm-2 (1 MeV neutron eq.)
  • radiation hard technology and design

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